7、无机械接触
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VARS Serles |
VARS150 |
VARS200 |
VARS250 |
VARS300 |
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|
Width |
150 mm |
200 mm |
250 mm |
300 mm |
|
|
Tabletop Diameter |
128.1 mm |
178.1 mm |
228.1 mm |
278.1 mm |
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|
Height |
80 mm |
90 mm |
100 mm |
110 mm |
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|
Aperture |
8mm |
20mm |
35 mm |
75 mm |
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|
Total Travel |
360° Continuous |
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Bus Voltage |
300 VDC |
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Fundamental Encoder Resolution |
3600 lines/rev |
8192 lines/rev |
11840 lines/rev |
18000 lines/rev |
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Max Speed |
300 rpm |
300 rpm |
500 rpm |
500 rpm |
|
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Accuracy |
±3 arc sec |
±2 arc sec |
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Repeatability(Bi-Directional) |
＜2 arc sec |
＜1 arc sec |
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Max Load |
Axial |
8kg |
30kg |
65kg |
100kg |
|
Radial |
4kg |
15kg |
30kg |
50kg |
|
|
Tilt |
3 N-m |
10 N-m |
28 N-m |
45 N-m |
|
|
Axial Error Motion |
＜175nm |
＜100nm |
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Radial Error Motion |
＜450nm |
＜250nm |
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Tilt Error Motion |
＜2.0 arc sec |
＜0.7 arc sec |
＜0.5 arc sec |
＜0.5 arc sec |
|
|
Axial Error Motion |
＜20 nm |
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Radial Error Motion |
＜20 nm |
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Tilt Error Motion |
＜0.08 arc sec |
＜0.06 arc sec |
＜0.04 arc sec |
＜0.04 arc sec |
|
|
Operating Pressure |
0.5 MPa ± 0.05 MPa |
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Air Consumption |
＜2 SCFM |
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Inertia |
Unloaded |
3800 kg-mm2 |
13850 kg-mm2 |
39000 kg-mm2 |
10300 kg-mm2 |
|
Total Mass |
4.6kg |
9.0kg |
15.5kg |
24.3kg |
|
|
Material |
Black Aluminum Body |
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