Mechanical Specifications

 165-100

 165-150

 165-200

 165-250

Travel

100 mm

150 mm

200 mm

250 mm

Calibrated Accuracy

±1 µm

±1 µm

±1.5 µm

±1.5 µm

Resolution

 1 nm – 10 nm

  1 nm – 10 nm

  1 nm – 10 nm

  1 nm – 10 nm

Repeatability (Bi-Directional)

 ±0.5 µm

±0.5 µm

 ±0.5 µm

±0.5 µm

Straightness & Flatness

 ±2.5 µm

 ±3 µm

 ±4.5 µm

 ±5 µm

Pitchc & Yaw

6 arc sec

7 arc sec

9 arc sec

10 arc sec

Maximum Speed

2 m/s

Maximum Acceleration

30 m/s2

Maximum Force (Continuous)

70 N

Load Capacity 

Horizontal

45 kg

Side

45 kg

Moving Mass

2.5 kg

Stage Mass

10 kg

11 kg

12 kg

13 kg

Material

Aluminum

MTBF

 20,000 hrs

Mechanical Specifications

 165-300

 165-400

 165-500

165-600

Travel

300 mm

400 mm

500 mm

600 mm

Calibrated Accuracy

±1.5 µm

±1.5 µm

±2 µm

±2 µm

Resolution

 1 nm – 10 nm

1 nm – 10 nm

 1 nm – 10 nm

 1 nm – 10 nm

Repeatability (Bi-Directional)

 ±0.5 µm

 ±0.5 µm

 ±0.5 µm

±0.5 µm

Straightness & Flatness

 ±6 µm

 ±8 µm

 ±9 µm

 ±10 µm

Pitch & Yaw

12 arc sec

15 arc sec

17arc sec

19 arc sec

Maximum Speed

2 m/s

Maximum Acceleration

30 m/s2

Maximum Force (Continuous)

70 N

Load Capacity 

Horizontal

45 kg

Side

45 kg

Moving Mass

2.5 kg

Stage Mass

14 kg

16 kg

18 kg

20 kg

Material

Aluminum

MTBF(Mean Time Between Failure)

 20,000 hrs